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`ABSTRACT Ob“ THfl
`) SCTIOSUR'?
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`An isolator includes: a working chamber in which work is
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`conducted;
`
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`an atomizer configured to
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`atomize air or
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`a
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`decontamination. material
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`in.
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`the working'
`
`chamber:
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`a
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`pump
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`configured.
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`to supply'
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`the decon
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`
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`atomizer;£1compressor‘configured'x)supplyrair'x)thezatomizer;
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`:amination. material
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`to the
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`
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`
`
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`a pressure sensor configured to measure an internal pressure
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`10
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`15
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`
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`of thexmorking chamber; andeacontrol unit.configured_to perform
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`a leak test,
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`in which the compressor is driven to supply air
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`from_the atomizer into the working chamber thereby pressuring
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` the working chamber,
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`and airtightness 0:
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`the working chamber
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`is tested based on the internal pressure 0'
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`2 the working chamber
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`measured by the pressure sensor.
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`l979C US
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