Appiication No: 14/097,681
`Amendment Dated Qc‘tober 3, 2016
`Repiy to Office Action of Euiy 5, 2016
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`Amendments to the Ciaims:
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`MTS»3683US
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`This iisting of ciairns wiii repiace aii prior versions and iistings of ciairns in the
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`appiication.
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`Listing of Ciaims:
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`1. _ 11.
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`(Canceiied)
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`12.
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`(Currently Amended) A deposition method for a deposition apparatus which
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`comprises a vacuum chamber, a hoiding part which hoids a base member in the vacuum
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`chamber, an evaporation source which has a principai surface inciined with respect to a
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`principai surface of the base member which is heid, and hoids a deposition materiai, and an
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`angie correcting member which is provided so as to cover an upper space of the principai
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`surface of the base member, and is provided outside a spetiai region which is encompassed by
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`iine segments which connect a periphery of the principai surface of the evaporation source and
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`a periphery of” the principai surface oi the base member, wherein
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`the principai surface of the base member, the principai surface of the evaporation source
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`and a principai surface facing the base member, of the angie correcting member, extend to a
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`depth direction in a case of viewing from a front of the vacuum chamber,
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`when an arbitrary point on the principai surface or the base member is denoted by a first
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`point and at ieast a center point on the principei surface of the evaporation source is denoted
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`by a second point in a case of viewing from the front of the vacuum chamber,
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`reguiating a direction from which the deposition materiai fiies over with respect to the
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`base member by using the angie correcting member in which at ieast a part of the principai
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`surface of the angie correcting member exists on a hoe which forms 45° from the first point
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`with respect to a iine which connects the first point and the second point, and another part of
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`the principai surface of the angle correcting member extends to a side opposite to the
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`evaporation source, and wherein
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`the angie correcting member is movabie with respect to the base member during
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`deposition, and
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`Aopiication No: 14/007i681
`Amendment Dated October 3, 2016
`Repiy to Office Action of Juiy 5, 2016
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`MTS-—3683US
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`performing deposition whiie Changing an incident angie distribution of an evaporation
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` . gerforrning deeosition based on a
`member is Jositioned at. a first position and
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`different from the first Qgeitiofl.
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`13,
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`16. {Cenoeiied}
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`17.
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`(New) The deposition method according to cieim 12, wherein in e ceee where the
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`anode correcting member is moved to the second position,
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`the angie correcting member is
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`moved in a direction going away from the evaporation source.
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`18,
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`(New) The deposition method according to ciaim 12, wherein a deposition time is
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`adjusted at the first position and the second position, reepectiveiy.
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`19“
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`(New) The deposition method according to eiaim 12, wherein the base memher is
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`a Soiid object, and the deposition ie performed on the soiiti object.
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`20.
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`(New) The deposition method according to ciaim 12, wherein the deposition is
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`performed on different feces of the haee mernher,
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`Page 3 of 7
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