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`5
`JP,2003-052419,A
` PA]
`
`(11)Pub|ication number
`(43)Date of publication of application
`(51)Int.Cl.
`
`(21)App!ication number
`(22)Date of filing
`(71)App|icant
`(72)Inventor
`
`20034362419
`04.03.2003
`BDiD 53/04
`0018 23/00
`
`F25d 3/04
`
`2001~258091
`28.08.2001
`NIPPON SANSO CORP
`IKEDA KENJI
`HAYASHIDA SHIGERU
`
`(54)METHOD FOR SEPARATING GAS MIXTURE AND APPARATUS FOR THE SAME
`
`V
`(57)Abstract
`PROBLEM TO BE SOLVED: To provide a method for separating and purifying a gas mixture and
`an apparatus for the same using a [oWutemperature adsorption-process optimized for
`separation and recovery of krypton from the gas mixture containing krypton having a high
`value added, and for recycling of krypton utiEized as an atmospheric gas in a semiconductor
`manufacturing device or the like.
`SOLUTION: In the method for separating and purifying krypton from the gas mixture containing
`nitrogen, krypton and halogenatated carbon-base gases, the method for adsorbing and
`separating the gases at a low temperature and the apparatus therefor are characterized by
`comprising a compression process, a purifying process removing moisture contained in a
`compressed gas mixture, a cooling process cooling the purified gas mixture obtained in the
`purifying process, a low-temperature adsorbing process adsorbing the halogenated carbon-base
`gases from the gas mixture in an adsorbing column, a separating process separating a gas
`mixture, which has not been adsorbed in the abOVe low-temperature adsorbing process, into
`nitrogen and krypton, a process collecting krypton separated in the above separating process as
`a product, and a regenerating process desorbing the gases adsorbed in the above low-
`temperature adsorbing process.
`
`Notice on Usage Privagy Policy Questionnaire
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`ill: Irl'nta H5313
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`PreVIOUs Document
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`To return to the
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`

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