* NOTICE*
`
`JPO and INPIT are not responsible for any damages caused by the use of this transiation.
`
`4. This document has been translated by computer. So the translation may not reflect the original precisely.
`
`2. *** shows a wordwhich cannot be transiated.
`
`3. in the drawings, any wards are not translated.
`
`Publication Number
`
`JP20080982534
`
`Bibliography
`(19) [Publication country] JP
`
`(2) [Kind of official gazette] A
`(11) [Publication number] 2009098253
`{43} [Date of publication of application) 20090807
`
`(54)
`
`[Tite of
`
`the invention] OPTICAL REFLECTION ELEMENT AND IMAGE
`
`G02B
`GO3B
`
`26/10
`21/00
`
`(2006.01)
`(2006.01)
`
`PROJECTOR USING THE SAME
`
`(51) finternational Patent Classification]
`
`26/08
`1/036
`
`5/74
`
`(2006.01)
`(2008.04)
`
`(2006.01)
`
`G02B
`HOSN
`
`HO4N
`
`iF]
`
`Go2B 26/08
`
`G02B 26/10
`
`GO2B 26/10
`
`1042
`
`HO4N
`
`1/036
`
`GO3B 21/00
`
`HOAN
`
`5/74
`
`E
`
`C
`
`Z
`
`Z
`
`A
`
`(21) fApptication number] 2007267594
`
`(22) [Filing date] 20071015
`
`(1) [Applicant]
`
`fName] PANASONIC CORP
`
`(72) [inventor]
`[Full name] FURUKAWA SHIGEO
`
`[Full name} TERADA RO
`iTheme code (reference}]
`
`

`

`2HO48
`
`2H141
`
`2K103
`
`§CO081
`
`5C058
`
`iF-term (reference) }
`
`ZHOASABOG
`
`2HO45AB13
`
`ZHO45AB73
`
`2HIEI MATIZ
`
`2H141MB24
`
`ZH141MCO9
`
`2H14 1IMD13
`
`2HIidiMDtS
`
`aHi4i Mos
`
`2HT41MD20
`
`Z2H141MD4d0
`
`2H1T41ME21
`
`2HId MEZS
`
`2HI4IMFi0
`
`2H14 1 MGod
`
`24H141MZ06
`
`ZH141MZ18
`
`ZKTOSAATS
`
`2K O3AB07
`
`2K10SBA02
`
`2KT03BC03
`
`2K 103BC47
`
`ZK103BC50
`
`2K 103CA20
`
`2KR103CA26
`
`SCOS1 AAO?
`
`5CO51CAG7
`
`§C051DB02
`
`§COS 1DB2d4
`
`§Cos1bcog
`
`

`

`§C051DC04
`
`SCOS1DCOS
`
`SCOS1TDCO?
`
`SCOS1DEZS
`
`SCOS8EA02
`
`SCOSBEATS
`
`Abstract
`
`(57) [Overview]
`
`PROBLEM TO BE SOLVED: To provide a large turning angle of a mirror pari 7 around
`@ Y-axis.
`
`SOLUTION:
`
`In an optical
`
`reflection element,
`
`the. connection structure 75 of first
`
`oscifiation parts 8A and 8B and the mirror part 7 Is a cantilever structure in which the
`
`connection part of onefirst oscillation part BA and a movable frame 9 is used as a fixed
`end 14. Thus the optical reflection element has higher freedom of the motions of the
`
`mirror part 7 and the first oscillation parts GA and 85, as a result, the large turning angie
`of the mirror part 7 around the Y-axis is available.
`
`Claim
`
`[Patent Claims]
`
`iClaim 4]
`
`Mirror part,
`
`A first vibrating part connected to the mirror part ;
`
`A* movable frame connected to the first vibrating part and surrounding the first vibrating
`
`part and the mirror part ;
`A 2 vibration part connected to the movabie frame ;
`
`A” supporting frame is connected to the 2 vibrating part and surrounds the 2 vibrating
`
`part and the movable frame.
`
`The first vibrating part has a meandering shape meandering in an X-axis direction of the
`
`mirror part.
`
`The 2 vibration part has a meandering shape meandering in the Y-axis direction of the
`
`mirror part.
`
`The optical reflection element has a cantilever structure in which a connecting par
`between the first vibrating part and the mirror part has a fixed end as a connecting part
`
`between one of the first vibrating part and the movable frame.
`
`fClaing 2]
`
`

`

`The first vibrating part and the 2 vibrating part are provided.
`
`An optical reflective element according to claim 7, comprising a piezoelectric actuator,
`
`iClaim 3]
`
`The aforementioned antical reflective element,
`
`Ar optical reflection element according to claim 1 or 2, wherein said first vibrating partian
`
`is provided on one of said mirror portions.
`
`iClaim 4]
`
`An optical reflection element according to any one of claims 1 fo 3, wherein the mirror
`
`portion is disposed substantially at the center of the movable frame.
`
`[Claim 5}
`
`Ani optical reflection element according to any ane of claims 1 to 4, wherein. a weight is
`placed on an upper surface and a lower surface of said mirror portion.
`
`fClaim 6]
`
`The mirror portion has irregulanties on its lower surface,
`A thickness of the mirror partion in the convex portion forming portion is larger than a
`
`thickness of the first vibrating portion.
`An optical reflection element according ta any ane of claims 7 to 4, wherein a weight is
`
`placed on an upper surface of said mirror portion.
`
`Claim 7]
`
`An optical reflection element according to any one of claims 1 to 6.
`
`An image projection apparatus includes a light source for making light Incident on the
`
`mirror portion of the optical reflection element.
`
`Description
`
`[Detailed description of the invention}
`iFechnical field]
`
`{0004}
`
`The present invention relates to an optical reflection element used in an image projection
`
`apparatus such as a projector, and an image projection apparatus using the same.
`
`fBackground of the Invention]
`
`{0002}
`
`As shownin FIG. 7, a conventional optical reffection element includes a mirror portion 1
`
`and a first vibrating portion 2 connected to the mirror portion 1. This device is provided
`
`with a * movable frame 3 connected to the first vibrating part 2 and surrounding the first
`
`vibrating part 2 and the mirror part 1, a 2 vibrating part 4 connected to the movabie frame
`
`3, and a “ supporting frame5 connected to the 2 vibrating part 4 and surrounding the 2
`
`

`

`vibrating part 4 and the movable frame 3.
`
`{0003}
`
`Further, the first vibrating portion 2 has a meandering shape meandering in the X-axis
`
`direction, and rotates the mirror portion 1 about the Y-axis. The 2 vibrating portion 4 has
`
`a meandering shape meandering in the Y-axis direction, and rotates the mirrar portion 1
`about the X-axis.
`
`jo004]
`
`The mirror unit 1 has a first vibrating unit 2 at ts opposite ends, and the first vibrating
`
`unit 2 is connected to the movable frame 3, so that the connecting structure 6 between
`
`the mirror unit 1 and the first vibrating unit 2 has a so-called double-supporied beam
`structure.
`
`it is.
`
`{o005]
`in addition, when light is incident on the mirror portion 7, the optical reflection slement
`
`can scan the reflection light in the X-axis and Y-axis directions by the vibration of the
`mirror portion 1, and can project an image on a wall or a screen, for example,
`
`{O006]
`
`Here,
`
`in a general optical reflection element for image projection,
`
`it is necessary to
`
`perform multiple scans in the X-axis direction while scanning is perfarmed 7 times in the
`
`Y-axis direction.
`
`In other words, # is necessary to design such that the scanning
`
`frequency in the X-axis direction increases with respect to the scanning frequency in the
`
`Y-axis direction.
`
`{O007}
`
`For example, Patent Document 1
`related to this application.
`
`is cited as disclosing an optical reflection element
`
`{Patent document 1]JP 2005-1484594
`
`[Disclosure of invention]
`
`iProbiem to be solved by the invention]
`
`{0008}
`
`To solve the problem that a turning angle around a Y axis of a mirror part 1 is smallin a
`
`conventional optical reflection element,
`
`fo009}
`That is, as described above, in order to increase the scanning frequency in the X-axis
`
`direction, iis necessary to set the meandering beam length of the first vibrating portion
`
`sufficiently shorter than the meandering beam length of the 2 vibrating portion. Therefore,
`
`

`

`the angle of rotation about the Y-axis is likely to be small, which is necessary for scanning
`
`in the X-axis direction.
`
`[0040}
`
`Accordingly, it is an object of the present invention to increase the angle of rotation of
`the mirror unit 1 about the Y-axis.
`
`[Means for solving the probleny]
`
`[0044]
`
`in order to achieve this object, in the present invention, the connecting structure of the
`first vibrating portion and the mirror portion has a cantilever structure in which a
`
`conmmecting portion between a first vibrating portion and a movahie frame is a fixed end.
`
`{Effect of theInvention]
`(0072)
`
`Thus, in the present invention, itis possible to increase the angie of rotation of the mirror
`
`portion about the Y-axis.
`[0043]
`
`This is because, due to the above structure, one end of the connecting structure between
`the mirror portion and the first vibrating portion becomes a free end.
`
`foo]
`
`Therefore, even when the scanning frequency in the X-axis direction is increased, the
`
`degree of freedom in the movement of the mirror portion and the first vibrating portion is
`
`increased, and as a result, the angle of rotation of the mirror portion around the Y-axis
`can be increased.
`
`[Best modefor carrying out the invention}
`
`[O04]
`
`(Embodiment 4}
`As shown in FIG.
`
`1
`
`{a},
`
`the optical
`
`reflection element according to the present
`
`ambodiment includes a mirror unit 7, a first vibrating unit 8 A that is connected to both
`
`ends of the mirror unit 7 and rotates the mirror unit 7 about its Y axis, and a * movable
`
`frame 9 that surrounds the first vibrating unit 8 A and surrounds the first vibrating units §
`
`A and 8 B and the mirror unit 8. 7 This device is provided with a 2 vibration part 10 a, 16
`
`b connected to the movableframe 9 and rotating & mirror part 7 about an X axis, and a
`
`* support frame 11 connected to the 2 vibration parts 10 a, 10 b and surrounding the
`
`vibration part 10 a, 10 b and the movable frame 9. 2. The mirrar unit 7 is disposed
`
`substantially af the center of the movable frame 9.
`
`{O0168]
`
`

`

`in addition, the optical reflection element of this embodiment includes a pair of first
`
`vibrating portions 8 A and 8 B and a pair of 2 vibrating portions 10 A and 10 B.
`
`[0047]
`
`in this embodiment, as shown in FIG. 1 b, the X-axis and the Y-axis of the mirror unit 7
`
`respectively mean the rotation center axes of rotation. of the mirrar unit 7 and are
`
`orthaganal to each other. it is preferable to set the intersection point at the center of the
`
`mirror 7.
`
`{O078]
`
`One of the 2 first vibrating portions 8 A and § B {the first vibrating portion 8 A) has one
`
`end connected to the lower end portion of the mirror portion 7 and the other end
`
`connected to the movabie frame &. Further, one end of the first vibrating portion § 6 =
`connected to the upper end of the mirror portion 7, but the other end thereof is not
`
`connected to the rnovable frame 9, and is a free end 12.
`
`{OG 19}
`in other words,
`
`in this embodiment, the connecting structure 13 between the 2 first
`
`vibrating portions 8A and 8 8 and the mirror portion 7 has a cantilever beam structure
`in which the connecting portion between the first vibrating portion 8 and the movable
`
`frame 9 is a fixed end 74.
`
`[0020]
`
`Note that these 2 first vibrating portions 8 A and 8 6B face each other in the Y-axis
`
`direction via the mirror partion 7.
`
`{0024}
`
`Further, each ofthe 2 2 vibrating portions 10 A, 10 B has one end connected ta the lower
`
`end portion of the movable frame 9 and the other end connected to the support frame
`
`441. Further, the 2 2 vibrating portions 10 A and 16 6 face each other in the X-axis
`
`direction via the movable frame 9.
`
`{0022}
`
`in this embodiment, 2 first vibrating portions 8 A and 8 B are connected to the right side
`
`of the mirror portion 7. buf may be connected ic the left side. In adclition, although 2 2
`
`vibrating portions 10 A and 708 are connected to the lower and portion of the movable
`
`frame 9 in this embodiment, they may be connected to the upper end partion.
`
`{0023}
`
`in addition,
`
`in this embodiment,
`
`the first vibrating pertions 8 A and & B meander
`
`repeatedly in the X-axis direction of the mirror portion 7, and have a serpentine shape
`
`having 4 plurality of portions parallel to the X-axis, and the 2 vibrating portions 10 A and
`
`10 8 meander repeatedly in the Y-axis direction of the miror portion * and have a
`
`

`

`meandering shape that has a plurality of partions parallel ta the Y-anis direction.
`
`{o024]
`
`As shown in FIG. 1, the first vibrating portions 8 A and 8 B and the 2 vibrating portions
`
`10 Aand 10 B of FIG. 2 a have a commonsilicon substrate 15 as a base, and a silicon
`
`oxide film 16 is formed on the siicon substrate 15, and a piezoelectric actuator is
`
`provided anthe silicon oxide film. 16.
`
`{O025}
`
`The piezoelectric actuator includes a ground electrode 17 stacked on the silicon oxide
`fim 16, a piezoelectric layer 18 stacked on the ground electrode 17, and a driving
`
`electrode 19 stacked on the piezoelectric layer 18 in common.
`
`{0026}
`in this embodiment, the rear surface of the silicon substrate 15 correspanding ta the first
`
`vibrating portions & A and 8 B, the 2 vibrating portions 10 A and 10 8, and the mirrar
`
`portion 7 is efthed to reduce the thickness thereof. In other words, the thickness of each
`of the first vibrating portions § A and 8 B and the 2 vibrating portions 10 A and 10 B and
`
`the mirror portion 7 in this embodiment is 120 p m, which is smaller Ghinner} than the
`thickness (525 u m)} of the movable frame 9 and the supporting frame 11.
`
`{0027}
`
`in the first vibrating portions 8 A and 8 B and the 2 vibrating portions 10 A and 10 8, itis
`
`easy to elastically deform by reducing the thickness, and the amplitude can be increased.
`
`Further, by increasing thefilm thickness of the movable frame 9, the movable frame 9
`
`functions as a weight for the 2 vibrating portions 10 A and 16 8B.
`
`it is possible to Increasethe amplitude in the Y-axis direction. Further, by increasing the
`
`film thickness of the support frame 11,
`the device can be easily handled and the
`mechanical strength of the entire device can be increased.
`
`{0028}
`
`it is to be noted that the ground electrode 17 may be formed of platinum, the driving
`
`electrade 19 may be made of gaid, the pieroclectric layer 1&4 may be made of lead
`
`zirconate titanate (Pb(Zrx, Tit - x} 3, and x = 0.525, and these may be formed into thin
`
`fiims by vapor deposition, sol gel, CVD, sputtering, or the like.
`
`{0029}
`
`Next, an operation of the optical reflection element of this embodiment will be described.
`
`{0030}
`
`First, an AC voillage having a resonance frequency is applied to the driving electrodes
`
`19 of the first vibrating portions 8 A and 8 B and the 2 vibrating portions 10 A and 10 B,
`
`

`

`respectively, and the piezoelectric actuators of the first vibrating portions 8 A and 8B
`
`and the 2 vibrating portions 10 A and 10 8 are driven together. Amplitude enlarges the
`
`first vibration portion 8A and 8B and the second vibration portion 104 and 10B by[ both ]
`
`resonating here, and ft can enlarge the rotating angle centering an the X-axis and the Y-
`
`axis of the mirror part 7.
`
`{0034}
`
`inthis embodiment, the 2 vibrating portions 10 A and 10 B change the bending direction
`
`in the Y-axis direction and vibrate according to the pasifive and negative of an alternating
`
`current vallage (electric signal) supplied frorn the driving electrode 19, and are thus
`
`vibrated. The upper and portion and the lower end portion of the movable frame 9 shown
`
`in FiG, 7 @ vibrate veniically (vertically), and the mirror portion 7 can be rotated about the
`X-axis while keeping the center of the mirrar portion 7 as a stationary point.
`
`{0032}
`
`Similarly, by the positive and negative of the alternating voltage supplied from the drive
`electrode 1%, the first vibrating portions § A and 8 B vibrate in the X-axis direction, and
`
`the je? and right end portions of the mirror portion ? wibrate vertically (vertically) due to
`the vibration, and the mirror portion 7 can be rotated about the Y axis while the centerof
`
`the mirror portion 7 is set as @ slationary point.
`
`[0033]
`
`in addition, as in the image projection apparatus shown in FIG. 3, the optical reflection
`
`element can project light (incident light 27) from a light source 20 such as a laser light
`
`source to the mirror portion 7, and scan the reflected ight 22 in the X-axis and Y-axis
`
`directions by the vibration of the mirror portion 7, thereby projecting the image 24 onte
`
`the screen 23 and the wall.
`
`[6034]
`Next, effects of the present embodiment will be described.
`
`{0035}
`
`in this embodiment, it is possible to increase the angle of rotation of the mirror unit 7
`
`about the Y-axis.
`
`{6036}
`
`This is because, by forming the connecting structure 13 between the mirror portion 7 and
`
`the first vibrating portions 8 A and 8 8, the end of the first vibrating partion & B becomes
`the free end 12.
`
`{0037}
`
`That is, in the conventional optical reflection element, the angie of rotation around the Y-
`
`axis of the mirror portion 7 is very small. This is because, as shown in FIG. 7, both ends
`
`

`

`of the mirror partion 7 are fixed to the movable frame 3 via the first vibrating portion 2.
`
`Accordingly, the rotation of the mirror 1 about the Y-axis is {imited by the reaction force
`
`from the fixed end, resulting in a decrease in the rotation angle.
`
`[0038}
`
`Note that, since the rotational oscillation frequency around the Y-axis becomes the
`
`scanning frequency in the X-axis direction,
`
`it becomes higher than the rotational
`
`oscillation frequency around the X-axis. As a result, the rotation angle around the Y-axis
`becomes further smafier.
`
`[o039}
`
`in contrast, in the present embodiment, as shown in FIG. 1 &, one.end of the connecting
`
`Structure 13 of the first vibrating portions 8 A and 8 8 and the mirror portion 7 is a free
`end 12, and therefore, atone end thereof, the movahle frame 9 is provided.
`
`No reaction force is generated. Therefore, in this embodiment, the degree. of freedom in
`the movement of the mirror portion 7 and the first wibraling portions 8 A and 8 6 is
`
`increased, and as a result, the angle of rotation around the Y-axis of the muror portion 7
`can be increased. In this embodiment, as a result of measurement, the rofation angie
`
`around the Y axis is about 4.8 times as large as in FIG. 7.
`
`[0040]
`
`in addition, in this embodiment, since the mirror portion 7 is disposed substantially at the
`
`center of the movable frame 9, the center of the mirror portion 7? becomes a stationary
`
`point. That is, position dispersion decreases in the center of the mirror part 7. Accordingly,
`
`distortion of an image projected using this optical reflection element can be reduced.
`
`[004 4]
`
`Further,
`in this embodiment, since the first vibrating portions 8 A and 8 b and the 2
`vibrating portions 10 4 and 10 b have a meandering shape, the length of the resonator
`
`can be adjusted to be long while reducing the size of the entire optical reflecting element,
`
`and the tuming angle of the mirror portion 7 can be increased.
`
`{0042}
`
`(Embodiment 2}
`As shown in FIG. 4, the optical reflection element of the present embodiment includes
`
`one first vibrating portion & A, and the first vibrating partion & A is disposed only on one
`
`side of the mirror portion 7. The connecting structure 13 of the first vibrating portion 8 A
`
`and the mirror portion 7 has a cantilever beamstructure in which the connecting portion
`
`between the first vibrating portion 8 A and the movable frame 9 is a fixed and 14.
`
`{0043}
`
`

`

`Further, the mirror portion 7 js dispased substantially at the center of the movable frame
`
`9. As shownin FIG. 5, the mirror portion 7 is rectangular when viewed from above.
`
`in
`
`addition, there are various crass sections, and there are, for example, the forms shown
`
`in FIGS. 6 2 to 2 e.
`
`{0044}
`
`in the mirror portion 7 shown in FIGS. 6 (a) to 3 {), the thickness of the first vibrating
`
`portion 8 Ais 120 ym, whereas the thickness of the mirror portion 7 in FIG. 6 (a) is 720
`
`Wm, the mirror portion in FIGS. & (c} and 7
`{p) and (cd) have irregularities.
`
`{0045}
`
`has a thickness of $25 pm, and FIGS. 6
`
`in the mirror portion 7 shown in FIGS. 6 (b) and 3 (a), a concave portion 25 is formed
`inside. the lower surface, and a convex portion 26 Grame) is pravided on an outer
`
`peripheryof the concave partion 3,
`
`[6046]
`The thickness of the mirror portion 7 at the portion where the convex portion 28 is formed
`
`is 405 up m, and the thickness of the concave portion 25 of the mirror portion 7 is
`approximately 720 yp m which is substantially the same as the thickness of the first
`
`vibrating portion & A. in ather words, in this embodiment, the thickness of the portion of
`
`the mirror portion 7 where the convex portion 26 is formed is larger than the thickness of
`
`the first vibrating portion 8 A.
`
`[00477
`
`in addition, a weight 27 is placed on an upper surface of the mirror portion 7 shown in
`
`FIG. 6 (d)}.
`
`{O049]
`
`in addition, eachof the optical reflection elements of the present embodimentis obtained
`by thinning the first vibrating portion 8 A and the 2 vibrating portions 16 A and 10 B by
`
`eiching, and the enfire iower surface of the mirror portion 7 of FIG. 6 a is provided. The
`
`recesses 25 of FIGS. 6 (b) and(d} are etched in the same process as the etching of the
`
`first vibrating portion 8 A and the 2 vibrating portions 10 A and 10 B.
`
`[6049]
`
`Therefore, the thickness of the mirror portion 7 of FiG. 6 a and the thickness of the
`
`concave partion 25 formed portion of the mirror partion 7 of FIGS. 6 b and 5 d are the
`
`same as those of the first vibrating portion & A and the 2 vibrating portions 70 A and 10
`B.
`
`{O050)
`
`in addition, the weight 27 placed on the upper surface of ihe mirror portion 7 shown in
`
`

`

`FIG. 6 (d) and FIG. 3 (3s formed by depositing silicon which is the same material as the
`
`substrate material. Other materials may be made to deposit. A material having high
`
`density and high adhesion to the substrate material is desirabie.
`
`{Q057]
`Effects of this embodiment will be described below.
`
`{0052}
`
`in this embodiment, since the first vibrating portion & A is provided only on one side of
`the mirror portion 7, the entire length of the meandering bearn of the first vibrating portion
`
`8 A can be shoriened, and the rotational vibration frequency (fH in Table 7} about the Y
`axis can be increased.
`
`{0053}
`
`Further, when the frequency fH of the vibration increases, generally, the rotation angle
`
`(@ H in Table 1) decreases, but in this embodiment, the degree of freedem in the
`movement of the mirror portion 7 and the first vibration portion 8 Ais increased by the
`
`cantilever structure, and as a result, the rotation angle 6 H around the Y-axis of the mirror
`portion 7 can be relatively increased.
`
`[0054]
`
`Further, in this embodiment, since only onefirst vibrating portion 8 A is provided, a dead
`
`space is formed in the movable frame 9. This dead space serves as the weight 27 for
`
`the 2 vibrating portions 10 A and 10 B. As a result, it is possible to reduce the frequency
`fy of the rotational vibration about the X-axis as a central axis and to increase the
`
`rotational angie.
`
`fo0Ss]
`
`Further, by reducing therotational vibration frequencyfv, it is possible to increase the
`frequency ratio fH / fy between the rotational vibration about the Y-axis and the rotational
`
`vibration about the X-axis. Thus, # is possible to increase the number of X-axis scanning
`
`lines in an image and to project a higher-definition image.
`
`{0056}
`
`Further, when compared with the case where the distance between the projection
`surface and the element is constant, it is possible to project a larger image by increasing
`
`the rotation angle.
`
`{0057}
`
`Further, as shown in FIG. 6 (6) to G, when at least a portion of the muror portion 7 is
`
`made thicker than the thickness of the first vibrating porlion 8 a and the mass of the
`
`mirror portion 7 is increased, i is possible to further increase the rotation angle 9 H about
`
`

`

`the Y-axis. This current state can be seen by comparing the optical reflection elament A
`
`and the optical reflection elements B to shown in Table 7. In addition, the optical reflection
`
`elament A shown in Table 7 includes a mirror portion 7 shown in FRG. 6 a, the optical
`
`reflection aement 8 includes a mirror partion 7 shown in FIG. 6 b. an optical reflection
`
`element C includes a mirror portion 6 shown in FRG. 6 c, an optical reflection element D
`
`includes @ mirror portion jtustrated in FIG. 6 @, and the like.
`
`{O058]
`
`[Table ]
`
`{O089]
`
`in addition, in the optical reflection elements B and D, the mass of the mirror portion 7
`
`can be adjusted by increasing the width of the convex portion 26 (the frame body} on ihe
`lower surface of the mirror portion 7 (the width in the horizontal direction of the mirror
`
`partion 7}. Accordingly, the mass of the mirror unit 7 is adjusted to a desired mass, and
`the rotation angle @ H is increased.
`
`““* is made.
`
`{O060]
`
`Further, if the depth of the concave portion 25 provided on the lower surface of the mirror
`
`portion 7 is equal to the depth of etching of the first vibrating portion 8 A and the 2
`
`vibrating portions 10 A and 10B,it can be formed in the sarne process, which leads to
`
`rationalization of production.
`
`[O06 1]
`Further,
`
`in the optical reflection element OD and the optical reflection element of this
`
`ambodiment, a weight 27 is laminated on the entire upper surface of the mirror 7. This is
`
`because the position of the center of gravity in the vertical section of the mirror portion 7
`
`is designed to be substantially ine same as the position of the center of gravity in the
`
`venical sectionof the first vibrating portion 8 A.
`
`{0062}
`
`in other words, as shown In FIGS. 7b and 6 c, in the optical reflection element B and the
`
`optical reflection element C shown in Table 7, since the center of gravity of the mirror
`
`portion 7 is shifted downward from the center of gravity of the first vibration portion 8 A,
`
`the center of gravily of the mirror portion 7 may be deviated in the X-axis direction, and
`
`the center of gravity of the mirror portion 7 may be shifted.
`
`

`

`{0063}
`
`On the other hand, as shown in FIG. 6 (d} and (}. since the position of the center of
`
`gravity of the mirror unit 7 andthe position of the center of gravity of the first vibrating
`
`wt 8 A can be set at substantially the same pasitions, when the first vibrating unit 8 A
`
`vibrates, the center position of the mirror unit ¢ hardly shifts in the X-axis direction, $0
`that a drive with Jess distortion can be realized.
`
`{O064]
`
`Note that, since the mass of the mirror 7 is too large, the rotation angie 6 H of the optical
`reflection elernent may be increased, but the frequency fH may decrease. in addition,
`
`since the mass of the mirror portion 7 is small,
`
`it is difficult for the optical reflection
`
`element Ato obtain the rotation angle 9 H.
`{0065}
`
`in this case, as shown in the optical reflection element D, itis effective to adjust the mass
`
`of the mirror unit 7 aS appropriate by the volume of the frame (projection 26) of the mirror
`unt 7 and the weight 27 stacked on the upper surface of the mirror unit 7.
`
`{0066}
`That is, in the optical reflection element D according to the present embodiment, when
`
`driving. ihe mass can be easily adjusted so as to be driven al a desired frequency TH and
`
`ata *6 H while suppressing the deviation of the center position of the mirror portion 7.
`
`[0067]
`
`Note that, as shown in FIG. 6 d, the mirror portion 7 of the optical reflection element D
`
`according to the present embodiment has the convex portion 26 formed along the outer
`
`periphery of the lower surface of the mirrar portion 7, but may be formed at the center of
`
`the lower surface of the mirror partion 7, or may be forrned by combining the outer
`
`periphery and the center. Accordingly, it is possible to appropriately adjust the mass of
`
`the mirror 7.
`
`{0068}
`Further, although in the present embodiment, the frame body (prajection partion 7} of the
`
`mirror portion 7 functions as the weight 27 an the lower surface of the mirrar portion 7, a
`
`thin filn-like weight 27 may be laminated on the upper and lower surfaces of the mirror
`
`portion 26 without forming the projection portion 26.
`
`industrial applicability]
`
`{0069}
`The optical reflection element of the present invention can be used, for example, in a
`
`smail image projection apparatus mounted on a mohile phone terminal orthe like.
`
`iBrief Description of the Drawings]
`
`

`

`{O070}
`
`[Fig. TIFUG. 3 a is a top viewof an optical reflection element according to Embodiment 1
`
`of the present invention, and FIG. 3 b is an enlarged top view of the essential portion
`
`thereof:
`
`{Fig. 2]The essential part cross sectional view of the optical reflective element in the
`
`embodiment 1 of the present invention
`
`[Fig. 3]The figure showing operation of ihe image projection device in the embodiment 4
`
`of the present invention
`
`[Fig. 4]The plan of the optical reflective element in the embodiment 2 of the present
`
`invention
`
`Fig. 5]The plan of the mirrar part in the embodiment 2 of the present invention
`
`[Fig. S]FKG. 2 is a cross-sectional view of a mirror unit 7 according to Embodiment 1 of
`
`the present invention ;
`[Fig. 7]The perspective view of the conventional optical reflective element
`
`[explanation of letters or numerais]
`{0074}
`
`? Mirror Part
`
`§ a first vibrating part
`
`& b first vibrating part
`
`9 Moving Frame
`
`10 4 2 vibrating part
`
`70 6 2 vibration unit
`
`41
`12
`
`Housing
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`43 connecting structure
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`14
`
`Fixed End
`
`15 silicon substrate
`
`46 silicon oxide film
`
`+?
`
`48
`
`49
`
`20
`
`21
`
`22
`23
`
`Ground Electrode
`
`Piezoelectric Layer
`
`Driving Electrode
`
`~=Laser Light Source
`
`incident Light
`
`Reflected Light
`Sereen
`
`

`

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`
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`
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`at
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`
`Concave Part
`
`Protruding Part
`
`Weight
`
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